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Process control of fluids, inspection and metrology systems

Company profile

HORIBA is a technology driven company that passions in developing process control, inspection and metrology systems based on it´s leadership in advanced inspection technologies.

Our core competences in the semiconductor industry are:

- Fluid Control (Gas & Liquid), Mass Flow, Vaporizer, Pressure Control

- Dry Process Monitoring in Real Time by OES & Interferometry

- Gas Concentration Monitoring

- Wet Process Monitoring, SC-1, SC-2, SPM, HF, Ozone, Peroxide, Dissolved Oxygen, TMAH, Micro-pH

- Particle Inspection for Photomasks

- New: in-situ CMP measurement modules for layer thickness

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