SmarAct: High-Precision Positioning for Research, Industry and Innovation

SmarAct Motion provides high-precision positioning systems for semiconductor and photonics processes. Nanometer-accurate motion supports wafer inspection, probing, lithography, and the active alignment of photonic components. SMARSLIDE^® piezo positioners enable linear, rotary, and goniometric motions, while SMARSHIFT^® direct drives deliver maintenance-free high-speed positioning for wafer handling and optical alignment. SMARFLEX^® scanners ensure maximum stability for fiber and lens alignment. SMARPOD^® hexapods and TRIPOD systems with multiple degrees of freedom are ideal for photonic integrated circuits and micro-assembly. Seamlessly integrable, SmarAct solutions ensure precision and reliability for the future of semiconductors and photonics.