SPT – Advanced Plasma and Vertical Batch Furnace Solutions for MEMS & Semiconductors

SPT is a leading manufacturer of semiconductor process equipment, specializing in plasma etching systems, PECVD equipment, and vertical batch furnaces. With proven expertise in MEMS fabrication and advanced wafer processing, SPT enables customers to achieve exceptional process precision, uniformity, and repeatability.

With more than 60 years of experience in thermal systems and over 30 years of innovation in Si DRIE (including the Bosch Process), combined with Japanese engineering excellence, SPT delivers high-performance platforms that support next-generation device manufacturing. Headquartered in Japan, the company provides comprehensive service and technical support across Asia, Europe, and the U.S.