Automatic measuring systems for contact angle and film stress, wafer scriber

OEG GmbH has been developing and producing high-precision optical measurement systems for optical, physical, and geometric parameters since 1991. Since then, OEG GmbH has established itself as a manufacturer of specialized industry-specific products that are used on all continents. For the semiconductor sector, OEG GmbH offers the SURFTENS WH 300 contact angle measurement system with a wafer robot, load port, and SECS/GEM interface. Furthermore, the MR200 precision micro-scriber has proven itself invaluable in research and development. The FLATSCAN wafer stress measurement system complements the product range. Hardware, software, and mechanical assemblies for our systems are developed and manufactured in-house at OEG GmbH. This allows us to guarantee extremely high service capabilities.