Robots, mobile robots, pod openers for semiconductor manufacturing automation

BEC Robotics offers a flexible mobile automation solution for clean rooms in semiconductor manufacturing with FABMOVER. Based on KUKA technology, it automates the handling of a wide variety of pods in existing plants, allowing production environments to be retrofitted efficiently. Thanks to integrated software interfaces such as SEMI E82 and E84, the FABMOVER can be seamlessly integrated into existing systems. Pod opener solutions are also available for the fully automated removal and transfer of wafers. With its precise navigation, high capacity and modular architecture, the FABMOVER increases throughput and process reliability, offering a future-proof platform for advancing automation in the semiconductor industry.