Complete fab solutions. From cleanroom to exhaust.

Pfeiffer Vacuum+Fab Solutions supplies turbomolecular vacuum pumps, dry vacuum pumps, and measurement equipment for applications including PVD, CVD, lithography, etch and implant processes as well as back-end applications. For inspection and metrology, we provide low-vibration vacuum solutions. Additionally, we offer leak detectors and systems for contamination management. Pfeiffer also manufactures flanges, valves, fittings and chambers as well as custom components.

Pfeiffer is part of the Busch Group, one of the world’s largest manufacturers of vacuum pumps, vacuum systems, blowers, compressors and gas abatement systems. Under its umbrella, the group houses two well-known brands: Busch Vacuum Solutions and Pfeiffer Vacuum+Fab Solutions.