Bronkhorst offers mass flow and pressure meters/controllers for low flow rates.

Bronkhorst High-Tech is a leading manufacturer in the field of flow measurement and control technology. With more than 40 years experience, we offer an extensive product range of thermal, Coriolis and ultrasonic flow meters and controllers for low flow rates of gases and liquids.
Our instruments - partly produced in a cleanroom - are used for a variety of applications in laboratories, test-benches, machinery and a wide variety of industries. Examples in the Semicon market: layer deposition and MOCVD processes, spray coating, nitrogen purge of wafer load port and FOUP systems.
By sharing our knowledge and closely cooperating with OEM customers, we develop customer specific low flow solutions, e.g. of multi-functional, pretested modules or skids for gas, liquid of vapor flow control.