Ebara has launched the new model LA+ cobustion based exhaus gas abatement system, engineered by safely neutralize process gases in the semiconductor manufacturing. Achieving a high destruction and removal efficiency of over 95% for hard-to-decompose gases like CF4, model LA+ utilizes a newly developen dual-stage combustion burner. This innovation reduces byproduct adhesion within the gas processing chamber while also lowering NOx/COx emissions. 
The unit's height has been reduced by approx. 50% compared to previous models, allowing for more effective use of upper space in facilities. 
In addition to convential fossil fuel, the model LA+ lineup now includes a hydrogen fuel option for customers seeking more sustainable energy choices. 
Despite its compact form, the model LA+ maintains the same high airflow capacity of 600L7min as the model TND, ensuring optimal performance.