Micro System Integration Center, Tohoku University
High quality R&D, joint research and training of staff in the field of MEMS
Company profile
The Microsystem Integration Center (µSIC) of Tohoku University is an R&D organization for manufacturing and system integration focused on microsystem technology. It is also active in device design, development and testing. We are collaborating with a wide variety of industry partners.
Open Collaboration: In an 1,800m² clean room, we operate a wide range of semiconductor process and evaluation equipment for microfabrication technologies. Proprietary processes as well as training are offered.
R&D: We promote joint research with companies that want to utilize Tohoku University’s technological capabilities or realise their own ideas with our support. We cover a wide range of fields from basic MEMS development up to system verification. There are many examples of successful commercialization through joint development with our center.
Open Collaboration: In an 1,800m² clean room, we operate a wide range of semiconductor process and evaluation equipment for microfabrication technologies. Proprietary processes as well as training are offered.
R&D: We promote joint research with companies that want to utilize Tohoku University’s technological capabilities or realise their own ideas with our support. We cover a wide range of fields from basic MEMS development up to system verification. There are many examples of successful commercialization through joint development with our center.
Products and services
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Main exhibitor
Contact
Micro System Integration Center, Tohoku University
519-1176 Aramaki-Aza-Aoba, Sendai 980-0845, Japan
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