Economic and customer-specific applications for any lot size
Feldkirch, Austria. Besides its amc-series spin coaters and developers amcoss GmbH also develops and produces equipment and devices for special applications in production processes, for single-unit production or small-lot fabrication in laboratories.
amcoss single machine for HMDS adhesion
Conventional coating equipment often will meet their limits when it comes to HMDS adhesion. amcoss amc hmds200 (a batch machine) on the contrary, has been explicitly developed for HMDS adhesion - even for MEMS applications. One of its great advantages is the carrier station, which holds up to 50 wafers (8 inch maximum) within two carriers that can all be processed at the same time. Compared to single-wafer-processing, output – and consequently – profitability, can be increased enormously. Besides, coating damages, very frequent in single-wafer-handling, can be excluded. There are two lot-control sensors that detect and register the number of carriers.
The HMDS stainless steel process chamber has got an integrated HMDS vaporizer with controlled N2 flow. Furthermore, HMDS concentration is being constantly monitored and exhaustion controlled. Thanks to these features the process can be monitored and controlled at all times which increases security and reduces defective production, reject and nonconformity costs at the same time. Our longtime proven amc software which is also used in the amc coaters controls the whole process. It guarantees reliable process control and simple, comfortable recipe writing.
amcoss laboratory hotplate for single- and small-lot production
For heating single wafers and other substrates in small quantities in the laboratory (temperatures between 40°C and 200°C), we recommend our amcoss laboratory hotplate. It is an extremely flexible device as far as its configuration and application possibilities are concerned. This is a significant advantage, especially for small lots that are submitted to a great variety of processes. In our hotplate, wafers with diameters between 2 and 8 inches and even special substrates such as square or rectangular wafers can be treated. Moreover, you can choose between 6 program recipes with individually controllable nominal temperature and processing time. Process temperature can be monitored over a temperature control display on the cover of the device. Our amcoss hotplate shows extraordinary temperature stability which means that even with higher temperatures deviations are minimal.
With its many standard features such es an effective exhaust control, four lift-pins, fixed proximity and a great variety of further configurational options (such as cover heating, various wafer acceptances and hotplate specifications) our laboratory hotplate guarantees reliable longtime operation, good serviceability and most of all, a very attractive cost-performance ratio.
amcoss amc r&d coaters for single-item or small-lot production
For the coating of wafers in the diameter range of 2 inches up to 450mm for small lot production, as for example in r&d laboratories, amcoss offers the amc r&d spin coater and developer with manual substrate handling. These coaters are being equipped with the same high-quality processing modules as the fully automated coaters of the amc series except for the wafer handling robot. Type and number of processing modules is determined by the customer, so that every device will be individual and adjusted to the customers´ needs. The integrated wafer-centring-system can be handled manually. With its r&d coater and "reduction to the essential" amcoss GmbH is able to offer an equipment that allows cost-effective operation even at small quantities.
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telefax +43 5522 209 50-9
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