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VAC.ROBOTICS robot platform with Substrate.Heating 1.000°C, Alignment, FLIP etc.

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Adenso . solutions you need

Substrate handling in high vacuum environments

Based on the modular VAC.ROBOTICS platform, Adenso customers configure their ClusterSystems for complex processes in the OPTICS and SEMI industry.


Options like Substrate.Heating up to 1.000°C, Alignment, FLIP etc. are modularly available for all substrate sizes and are fully controlled by adControl, Adenso´s cluster operating system.

Configure your own Cluster.Platform simply online:   www.VACROBOTICS.solutions

Adenso products are fully developed and produced in Silicon Saxony in and around Dresden, so they are completely Made in Germany.


#waferhandling #vacrobotics

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