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Advanced Packaging Lithography & Process

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At SEMICON booth B1818, Ushio presents top-of-the-line specialist industrial light source solutions for lithography, thermal processing, and surface treatment applications.

Among the UV, visible & IR products on show, visitors will be treated to the European launch of several new Ushio products. These include a new line of LED heating modules, Direct Imaging systems, the UX4 full-field projection mask aligner exposure system, and LPP technology – the most versatile and compact EUV laser-produced plasma source on the market.

Besides new developments, the extended Ushio product portfolio is up for discussion. The Ushio experts, at booth B1818, are prepared to give the answers to your queries on super-high pressure (SH) lamps, SSLS, halogen heating, UVE, and excimer technology. See you there!