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Company profile

The MPS as member of the PVA TePla AG group is engaged within three business units; these are with VPD and SIRD metrology systems for wafer inspection on one hand side. The third focus is on plasma treatment along the whole production process of micro-structures. From the removal of photo-resists on wafer to cleaning and activation of processed surfaces, in the field of Frontend as well as in the Backend of chip-production, the MPS provides a broad and at the same time application related product portfolio. With its decade-long expertise in processes, the MPS is a reliable partner for application-targeted and smooth realization of production lines. 

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