Since 2001, Kloe offers the global range of photolithography equipment: from uv-led exposure-masking system and mask aligner to direct laser writing machines and high resolution 3D printer.

Our equipment offer some great technological breakthrough:

• a real vectorial mode of writing and dynamically controlled stages for our Dilase range of maskless equipment
• a cold monochromatic UV-LED source and a unrivalled quality of collimation for our UV-KUB range of masker and mask aligner
• the capability to create large volume objects (100x100x50mm3) with a very high resolution (<5µm) for our high resolution 3D printer Dilase 3D

Deployed all over the world, Kloe’s photolithography machines answer the specifications of researchers in microelectronics, semiconductor manufacturing, MEMS, microfluidics.