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SensArray® products enable in situ monitoring of process tools’ environments

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KLA’s comprehensive portfolio of SensArray® products (booth B1.220) enables in situ monitoring of process tools’ environments. With wired and wireless sensor wafers and reticles, an automation package and data analysis systems, SensArray® products provide comprehensive information for a wide range of wafer and reticle processes. Wafer process equipment manufacturers, IC manufacturers and reticle manufacturers use SensArray® data to visualize, diagnose and control process conditions.

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