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scia Systems is a full range supplier of advanced ion beam and plasma processing equipment. The systems are applicable for coating and etching processes, e.g. in the production of microelectronics, MEMS and precision optical components. Due to their flexible and modular design, the systems can be configured for both high volume production as well as research and development environments. Together with our worldwide service partners, we offer comprehensive service and superior technology support. Our wide range of processing technologies includes etching processes, like Ion Beam Trimming, Ion Beam Milling and Reactive Ion Etching as well as coating processes such as Ion Beam Sputtering, PECVD and Magnetron Sputtering.

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